一．    设备简介

One Equipment introduction

半导体超纯水设备是应用于半导体生产零件清洗的超纯水设备，需要符合特定的用水水质标准,半导体超纯水设备出水水质要符合美国ASTM纯水水质标准、中国电子工业电子级水质技术标准(18MΩ.cm、15MΩ.cm、10MΩ.cm、2MΩ.cm、0.5MΩ.cm)、半导体工业用纯水指标、集成电路水质标准。 安博体育水务在满足用户用水标准的基础上，在设备系统中水箱均设有液位控制系统、水泵均设有压力保护装置、在线水质检测控制仪表、电气采用PLC可编程控制器，真正做到了无人职守，同时在工艺选材上采用推荐和客户要求的方法，使设备与其它同类产品相比较，具有更高的性价比和设备可靠性。

Semiconductor ultra pure water equipment is an ultra pure water equipment used for cleaning semiconductor production parts, which needs to meet the specific water quality standards. The effluent quality of semiconductor ultra pure water equipment should meet the ASTM pure water quality standard of the United States and the electronic grade water quality technical standard of China Electronic Industry (18m) Ω. cm、15M Ω. cm、10M Ω. cm、2M Ω. cm、0.5M Ω. Cm), pure water index for semiconductor industry, integrated circuit water quality standard. On the basis of meeting the user's water use standard, Hongjie water has set up liquid level control system in the water tank of the equipment system, pressure protection device in the water pump, online water quality detection and control instrument, and PLC programmable controller in the electrical system, so that no one is on duty. At the same time, the method of recommendation and customer requirements is adopted in the process of material selection, so that the equipment is compared with other similar products, It has higher cost performance and equipment reliability.

二．    设计标准及依据

2 Design standard and basis

1. 根据用户提供的详细水质报告“量身定制”。

1. According to the detailed water quality report provided by the user, "customized".

2. 水处理设备技术条件《JB/T 2932-1999》

2. Technical conditions of water treatment equipment JB / T 2932-1999

3. 反渗透水处理设备标准《CJ/T119-2000》

3. Standard for reverse osmosis water treatment equipment CJ / t119-2000

4. 低压开关设备和控制设备成套装置《IEC439-1 》

4. Complete set of low voltage switchgear and control equipment iec439-1

5. 实验室超纯水技术指标标准《GB6682-2008 》

5. Technical index standard of laboratory ultra pure water gb6682-2008

6. 电子级超纯水规格《GB/T11446.1-1997》

6. Electronic grade ultra pure water specification GB / t11446.1-1997

三．    工艺流程

Three technological process

原水－原水箱－原水加压泵 －絮凝剂/还原剂－活性炭过滤器 － 超滤－阻垢剂－保安过滤器－一级高压泵－一级反渗透－PH 调节－中间水箱 －二级高压泵－二级反渗透 －纯化水箱－EDI增压水泵-紫外灯杀菌器－精密过滤器－EDI系统－超纯水箱－终端输送泵－TOC脱除器－抛光装置－终端滤器－用水点

Raw water - Raw water tank - Raw water booster pump - Flocculant/reducing agent - Activated carbon filter - Ultrafiltration - Scale inhibitor - Security filter - First stage high-pressure pump - First stage reverse osmosis - PH regulation - Intermediate water tank - Second stage high-pressure pump - Second stage reverse osmosis - Purified water tank - EDI booster pump - UV lamp sterilizer - Precision filter - EDI system - Ultra pure water tank - Terminal transfer pump - TOC remover - Polishing device - Terminal filter - Water point

目前市场上的工艺根据原水水质和用水水质要求不同，所用工艺也有所不同。

At present, the processes used in the market vary depending on the requirements for raw water quality and water quality.

超纯水设备系统工艺介绍：

Introduction to the process of ultra pure water equipment system:

满足用户需要，达到符合标准的水质，尽可能地减少各级的污染，在工艺设计上，取达国家自来水标准的水为源水，再设有介质过滤器，活性碳过滤器，精密过滤器等预处理系统、双级RO反渗透主机系统、EDI或离子交换混床系统等。

Satisfy user needs, achieve water quality that meets standards, and minimize pollution at all levels. In process design, take water that meets national tap water standards as the source water, and then install pre-treatment systems such as medium filters, activated carbon filters, precision filters, two-stage RO reverse osmosis host systems, EDI or ion exchange mixed bed systems, etc.

四．    设计特点

Four Design features

1. 系统采用全自动控制(同时亦可采用手动控制），系统运行时可设定自动反洗、再生程序；

1. The system adopts full automatic control (manual control is also available), and automatic backwashing and regeneration procedures can be set during system operation;

2. 各单元接线均在工厂内完成，减少安装调试时间；

2. The wiring of each unit is completed in the factory to reduce the installation and debugging time;

3. 一级反渗透和二级反渗透设有回流管道，反渗透设备设有化学清洗装置；

3. The primary RO and secondary ro are equipped with return pipes, and the RO equipment is equipped with chemical cleaning device;

4. 管道一般采用UPVC材质；

4. UPVC material is generally used for pipes;

5. 集成控制系统和集成仪表系统等，方便操作管理；

5. Integrated control system and instrument system to facilitate operation and management;

6. 部件更加耐用，长期无需维修；

6. The components are more durable and do not require maintenance for a long time;